Control of Micromanipulator. (6th Report, Mechanism and Control of the Electrostatic Force Actuator With 3 DOF).
Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C - Japan
doi 10.1299/kikaic.57.1287
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Date
January 1, 1991
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Japan Society of Mechanical Engineers