Ellipsometric Characterization of Amorphous and Polycrystalline Silicon Films Deposited Using a Single Wafer Reactor

Applied Physics Letters - United States
doi 10.1063/1.118306
Full Text
Abstract

Available in full text

Date
Authors
Publisher

AIP Publishing

Related search

Quantitative Photopyroelectric Out-Of-Phase Spectroscopy of Amorphous Silicon Thin Films Deposited on Crystalline Silicon

Canadian Journal of Physics
AstronomyPhysics
1991English

Integration of Amorphous and Polycrystalline Silicon Thin-Film Transistors Through Selective Crystallization of Amorphous Silicon

Applied Physics Letters
AstronomyPhysics
1999English

Electrical Characterization of Amorphous LiAlO2 Thin Films Deposited by Atomic Layer Deposition

RSC Advances
ChemistryChemical Engineering
2016English

Tritiated Amorphous Silicon Films and Devices

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
1998English

Numerical Simulation of a Single-Wafer Isothermal Plasma Etching Reactor

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
1990English

Structure of Amorphous Silicon and Germanium Alloy Films

1991English

Solid-Phase Crystallization of Amorphous Silicon Films

2015English

Doping of Amorphous and Microcrystalline Silicon Films Deposited at Low Substrate Temperatures by Hot-Wire Chemical Vapor Deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2001English

Silicon Oxynitride Films Deposited by Reactive High Power Impulse Magnetron Sputtering Using Nitrous Oxide as a Single-Source Precursor

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2015English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy