Study on Cone-Defects During the Pattern Fabrication Process With Silicon Nitride

Journal of Photopolymer Science and Technology- Japan

doi 10.2494/photopolymer.28.17

Full Text

Abstract

Available in

Date

Authors

Publisher

Technical Association of Photopolymers, Japan

Related search

Defects in Green Bodies During Powder Compression Process for Fabrication of Bulk Superconductors

TEION KOGAKU (Journal of the Cryogenic Society of Japan)
2007English

Simulation and Fabrication of Silicon Nitride Microring Resonator by DUV Lithography

2016English

Influence of Hydrogen Effusion From Hydrogenated Silicon Nitride Layers on the Regeneration of Boron-Oxygen Related Defects in Crystalline Silicon

Journal of Applied Physics
AstronomyPhysics
2013English

Fabrication of Silicon Nitride Waveguides for Visible-Light Using PECVD: A Study of the Effect of Plasma Frequency on Optical Properties

Optics Express
OpticsAtomicMolecular Physics,
2008English

Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques

Journal of Visualized Experiments
ImmunologyMolecular BiologyBiochemistryMicrobiology Chemical EngineeringNeuroscienceGenetics
2018English

Silicon Nitride Joining.

1984English

High-Q-Factor Al2O3 Micro-Trench Cavities Integrated With Silicon Nitride Waveguides on Silicon

Optics Express
OpticsAtomicMolecular Physics,
2018English

H Loss Mechanism During Anneal of Silicon Nitride: Chemical Dissociation

Journal of Applied Physics
AstronomyPhysics
2000English

Integration of Nanodiamonds With NV-centers on Optical Silicon Nitride Structures

EPJ Web of Conferences
AstronomyPhysics
2019English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2026 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy