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Avoiding the Curtaining Effect: Backside Milling by FIB INLO

Microscopy and Microanalysis - United Kingdom
doi 10.1017/s1431927603441044
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Abstract

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Categories
Instrumentation
Date

July 28, 2003

Authors
Stephen M. SchwarzBrian W. KempshallLucille A. Giannuzzi1Molly R. McCartney
Publisher

Cambridge University Press (CUP)


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