Amanote Research
Register
Sign In
Low-Speckle Holographic Beam Shaping of High-Coherence EUV Sources
doi 10.1117/12.881553
Full Text
Open PDF
Abstract
Available in
full text
Date
March 17, 2011
Authors
Christopher N. Anderson
Ryan H. Miyakawa
Patrick P. Naulleau
Publisher
SPIE
Related search
Thermocapillary Manipulation of Droplets Using Holographic Beam Shaping: Microfluidic Pin Ball
Applied Physics Letters
Astronomy
Physics
Time-Dependent Speckle in Holographic Optical Coherence Imaging and the Health of Tumor Tissue
Optics Letters
Optics
Atomic
Molecular Physics,
Speckle-Field Digital Holographic Microscopy
High Temperature Metal Atom Beam Sources
Review of Scientific Instruments
Medicine
Instrumentation
Coherence of VCSEL's for Holographic Interconnects
IEEE Photonics Technology Letters
Electronic Engineering
Optics
Molecular Physics,
Optical
Electrical
Atomic
Magnetic Materials
Electronic
EUV Light Sources for Next-Gen Lithography
Optics and Photonics News
Electronic Engineering
Condensed Matter Physics
Electronic
Molecular Physics,
Optical
Electrical
Atomic
Magnetic Materials
Optics
Progress in EUV Resists Towards High-Na EUV Lithography
High Damage Threshold Liquid Crystal Binary Mask for Laser Beam Shaping
High Power Laser Science and Engineering
Optics
Nuclear Energy
Molecular Physics,
High Energy Physics
Engineering
Optical
Atomic
Magnetic Materials
Nuclear
Electronic
Progress Overview of EUV Resists Status Towards High-Na EUV Lithography