Mechanical and Electrical Properties of Carbon Films Prepared by Radio Frequency Magnetron Sputtering of Woodceramics.

Journal of the Ceramic Society of Japan

doi 10.2109/jcersj.108.32

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Abstract

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Date

January 1, 2000

Authors

Kiyotaka SHIBATA

Masahisa OTSUKA

Publisher

Ceramic Society of Japan

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