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Robust 3-Metallization BEOL Process for 0.18 Μm Embedded FRAM
doi 10.7567/ssdm.2004.d-1-4
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Date
January 1, 2004
Authors
S.K. Kang
H.S. Rhie
H.H. Kim
B.J. Koo
H.J. Joo
J.H. Park
Y.M. Kang
D.Y. Choi
S.Y. Lee
Kinam Kim
Publisher
The Japan Society of Applied Physics
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