(PDF) Study of the Microstructure Transition Width From

Study of the Microstructure Transition Width From Amorphous to Microcrystalline Silicon as a Function of the Input Silane Concentration

doi 10.1117/12.825799

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Abstract

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Date

August 20, 2009

Authors

F. Meillaud-Sculati

Ch. Hollenstein

Publisher

SPIE

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