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Thin-Film Transistors in Polycrystalline Silicon by Blanket and Local Source/Drain Hydrogen Plasma-Seeded Crystallization
IEEE Transactions on Electron Devices
- United States
doi 10.1109/16.853037
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Categories
Electronic Engineering
Optical
Electrical
Magnetic Materials
Electronic
Date
January 1, 2000
Authors
K. Pangal
J.C. Sturm
S. Wagner
N. Yao
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
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