(PDF) Low-Temperature Growth Process of Polycrystalline

Low-Temperature Growth Process of Polycrystalline Silicon for Thin Film Transistors.

SHINKU

doi 10.3131/jvsj.37.875

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Abstract

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Date

January 1, 1994

Authors

Tatsuru SHIRAFUJI

Kunihide TACHIBANA

Publisher

The Vacuum Society of Japan

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