Thickness and Temperature Depending Intermixing of SiOx/SiO2 and SiOxNy/SiO2 Superlattices: Experimental Observation and Thermodynamic Modeling
Applied Physics Letters - United States
doi 10.1063/1.4953095
Full Text
Open PDFAbstract
Available in full text
Date
May 30, 2016
Authors
Publisher
AIP Publishing