Study of Post-Deposition Contamination in Low-Temperature Deposited Polysilicon Films

doi 10.1016/b978-0-444-82413-4.50026-3
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Elsevier

Related search

Hot-Wire Polysilicon Waveguides With Low Deposition Temperature

Optics Letters
OpticsAtomicMolecular Physics,
2013English

Thermal Expansion of Low-Pressure Chemical Vapor Deposition Polysilicon Films

Journal of Materials Research
Mechanics of MaterialsMaterials ScienceCondensed Matter PhysicsMechanical Engineering
2002English

Low-Temperature Deposition of Silicon Dioxide Films in High-Density Plasma

Semiconductor Physics, Quantum Electronics and Optoelectronics
Electronic EngineeringOpticsMolecular Physics,OpticalElectricalAtomicMagnetic MaterialsElectronic
2013English

Low Temperature Fabrication of Thermochromic VO2thin Films by Low-Pressure Chemical Vapor Deposition

RSC Advances
ChemistryChemical Engineering
2017English

Low Temperature Deposition of SiNx Thin Films by the LPCVD Method

Croatica Chemica Acta
Chemistry
2012English

Low Temperature Temporal and Spatial Atomic Layer Deposition of TiO2 Films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2015English

High‐rate, Low‐temperature Deposition of Multifunctional Nano‐crystalline Silicon Nitride Films

Journal of Information Display
Electronic EngineeringElectricalMaterials Science
2010English

High Temperature Dielectric Properties of (BxNyOz) Thin Films Deposited Using Ion Source Assisted Physical Vapor Deposition

Journal of Advanced Dielectrics
Electronic EngineeringCondensed Matter PhysicsOpticalElectricalMagnetic MaterialsCompositesElectronicCeramics
2015English

Low-Temperature, Low-Pressure Chemical Vapor Deposition and Solid Phase Crystallization of Silicon–Germanium Films

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
2009English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy