Preparation of Hard CNx Films by Reactive Sputtering.

SHINKU
doi 10.3131/jvsj.44.306
Full Text
Abstract

Available in full text

Date
Authors
Publisher

The Vacuum Society of Japan

Amanote Research

Note-taking for researchers

Follow Amanote

© 2026 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy