Ultrathin HfO[sub 2](EOT<0.75 Nm) Gate Stack With TaN∕HfN Electrodes Fabricated Using a High-Temperature Process

Electrochemical and Solid-State Letters
doi 10.1149/1.2052051
Full Text
Abstract

Available in full text

Date
Authors
Publisher

The Electrochemical Society

Related search

Ge MOS Capacitors With Thermally Evaporated HfO[sub 2] as Gate Dielectric

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
2006English

Comprehensive Understanding of PBTI and NBTI Reliability of High-K / Metal Gate Stacks With EOT Scaling to Sub-1nm

2007English

Degradation and Breakdown of Sub-1nm EOT HfO2/Metal Gate Stacks

2006English

Crystal Phase Distribution and Ferroelectricity in Ultrathin HfO 2 –ZrO 2 Bilayers

Physica Status Solidi (B): Basic Research
OpticalElectronicCondensed Matter PhysicsMagnetic Materials
2019English

Effect of Nitridation on Low-Frequency (1/F) Noise in N- And P-Mosfets With HFO[sub 2] Gate Dielectrics

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
2006English

InGaAs Tunnel FET With Sub-Nanometer EOT and Sub-60 mV/dec Sub-Threshold Swing at Room Temperature

Applied Physics Letters
AstronomyPhysics
2016English

A Resistorless Voltage Reference With High-Order Temperature Curvature Compensation in 55 Nm CMOS Process

2017English

Size and Shape Control of Sub-20 Nm Patterns Fabricated Using Focused Electron Beam-Induced Processing

Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic EngineeringCondensed Matter PhysicsMechanical EngineeringElectronicMolecular Physics,NanoscienceOpticalElectricalAtomicMagnetic MaterialsNanotechnologyOptics
2014English

High Reliability Ultrathin Interpolyoxynitride Dielectrics Prepared by N[sub 2]O Plasma Annealing

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
2003English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy