An Evaluation of an Automated Detection Algorithm to Count Defects Present in X-Ray Topographical Images of SiC Wafers

Materials Research Society Symposium - Proceedings- United States

doi 10.1557/proc-0994-f11-13

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Categories

Mechanics of Materials

Materials Science

Condensed Matter Physics

Mechanical Engineering

Date

January 1, 2007

Authors

Patrick J. McNally

Andreas Danilewsky

Turkka O. Tuomi

Antti Säynätjoki

Stanislav Soloviev

Larry B. Rowland

Peter M. Sandvik

Publisher

Cambridge University Press (CUP)

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