(PDF) MD Simulation of Hardness Property of Al Thin Film

MD Simulation of Hardness Property of Al Thin Film Sputtered on Si Substrate and Its Related to Porosity.

JSME International Journal Series A

doi 10.1299/jsmea.44.346

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Abstract

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Date

January 1, 2001

Authors

Toshihiko HOSHIDE

Publisher

Japan Society of Mechanical Engineers

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