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Enhanced Performance of Tri-Gate Transistors With Gnox Using Optimized Novel SOI Realization Technology
doi 10.7567/ssdm.2011.d-6-4
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Date
September 30, 2011
Authors
S. H. Kim
H. J. Bae
C. W. Oh
D. W. Kim
S. Yamada
G. Y. Jin
Y. Roh
Publisher
The Japan Society of Applied Physics
