In-Situ Measurement and Control of Wafer Temperature Using Micro Sensor (1st Report, an Experimental Study by Using Large Model)
Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C - Japan
doi 10.1299/kikaic.74.1740
Full Text
Open PDFAbstract
Available in full text
Date
January 1, 2008
Authors
Publisher
Japan Society of Mechanical Engineers