(PDF) Specifics of Fabrication of Ohmic Contacts to

Specifics of Fabrication of Ohmic Contacts to AlGaAs/GaAs Heterostructures With a 2D Electron Gas

Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering

doi 10.17073/1609-3577-2016-4-271-278

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Abstract

Available in full text

Date

December 30, 2016

Authors

M. V. Stepushkin

Publisher

National University of Science and Technology MISiS

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