Specifics of Fabrication of Ohmic Contacts to AlGaAs/GaAs Heterostructures With a 2D Electron Gas

Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering
doi 10.17073/1609-3577-2016-4-271-278
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National University of Science and Technology MISiS


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