The Desorption Behaviour of Implanted Noble Gases at Low Energy on Silicon Surfaces

Surface Science - Netherlands
doi 10.1016/s0039-6028(87)80120-6
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Elsevier BV

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy