(PDF) Electron Backscatter Diffraction Analysis for

Electron Backscatter Diffraction Analysis for Polarization of SrBi2(Ta,Nb)2O9Ferroelectric Capacitors in Submicron Small Area

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes - Japan

doi 10.1143/jjap.47.262

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Date

January 18, 2008

Authors

Kazuhiro Kaibara

Kiyoshi Uchiyama

Yasuhiro Shimada

Publisher

Japan Society of Applied Physics

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