Computer Simulation for UV-preionized Discharge KrF Laser

The Review of Laser Engineering
doi 10.2184/lsj.9.527
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Laser Society of Japan

Related search

O-Nitrobenzyl Ester Based Deep UV Resist for KrF Excimer Laser Lithography

Polymer Journal
PolymersMaterials ChemistryPlastics
1989English

One Meter KrF Laser System

1977English

Experimental Support for KrF Laser Modeling. Final Report

1989English

Experiments of Discharge Guiding Using Strongly and Weakly Ionized Plasma Channel Produced by KrF Laser

IEEJ Transactions on Fundamentals and Materials
Electronic EngineeringElectrical
2003English

High Pressure X-Ray Preionized TEMA-CO2 Laser

Applied Physics B Photophysics and Laser Chemistry
1987English

KrF Laser Cost/Performance Model for ICF Commercial Applications

Fusion Technology
1985English

Characteristics of an X-Ray Preionized TEA CO Laser

Applied Physics B Photophysics and Laser Chemistry
1987English

Theoretical Analysis on a Microwave-Discharge-Pumped KrF Excimer Lamp

IEEJ Transactions on Electronics, Information and Systems
Electronic EngineeringElectrical
1991English

A Multichannel Discharge UV Source

Instruments and Experimental Techniques
Instrumentation
2010English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2025 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy