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Atomic Layer Deposition of High-K Dielectric Layers on Ge and III-V MOS Channels

ECS Meeting Abstracts
2008English

Crystalline SrZrO3 Deposition on Ge (001) by Atomic Layer Deposition for High-K Dielectric Applications

Journal of Applied Physics
AstronomyPhysics
2018English

Atomic Layer Deposition of High-K Insulators on Epitaxial Graphene: A Review

Applied Sciences (Switzerland)
InstrumentationMaterials ScienceFluid FlowEngineeringComputer Science ApplicationsProcess ChemistryTransfer ProcessesTechnology
2020English

Quantum Simulation of C-V and I-V Characteristics in Ge and III-V Materials/High-Κ MOS Devices

Materials Research Society Symposium - Proceedings
Mechanics of MaterialsMaterials ScienceCondensed Matter PhysicsMechanical Engineering
2009English

Structure and Dielectric Property of High-K ZrO2 Films Grown by Atomic Layer Deposition Using Tetrakis(Dimethylamido)Zirconium and Ozone

Nanoscale Research Letters
Materials ScienceNanotechnologyCondensed Matter PhysicsNanoscience
2019English

Atomic Layer Deposition of Functional Layers in Planar Perovskite Solar Cells

Solar RRL
2019English

InAs-oxide Interface Composition and Stability Upon Thermal Oxidation and High-K Atomic Layer Deposition

AIP Advances
NanotechnologyAstronomyPhysicsNanoscience
2018English

Interface Properties Study on SiC MOS With High-K Hafnium Silicate Gate Dielectric

AIP Advances
NanotechnologyAstronomyPhysicsNanoscience
2018English

Theory of Hole Mobility in Strained Ge and III-V P-Channel Inversion Layers With High-Κ Insulators

Journal of Applied Physics
AstronomyPhysics
2010English

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