Amanote Research
Register
Sign In
Atomic Layer Deposition of High-K Dielectric Layers on Ge and III-V MOS Channels
doi 10.1149/1.2986824
Full Text
Open PDF
Abstract
Available in
full text
Date
January 1, 2008
Authors
Annelies Delabie
A. Alian
Florence Bellenger
Guy Brammertz
David P. Brunco
Matty Caymax
Thierry Conard
A. Franquet
Michel Houssa
Sonja Sioncke
S. Van Elshocht
J. L. Van Hemmen
W. Keuning
W. M. Kessels
Valery Avanasiev
Andre Stesmans
Marc M. Heyns
Marc Meuris
Publisher
ECS
