Characterization of Oxygen and Nitrogen Rapid Thermal Annealing Processes for Ultra-Low- K SiCOH Films

Journal of Materials Research - United Kingdom
doi 10.1557/jmr.2008.0106
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Cambridge University Press (CUP)

Related search

Deposition and Properties of Thin PECVD Carbon Films After Rapid Thermal Annealing

Le Journal de Physique IV
1995English

Effects of Annealing Condition on Low-K A-SiOC:H Thin Films

Electrochemical and Solid-State Letters
2007English

Rapid Thermal Annealing of Sputter-Deposited ZnO:Al Films for Microcrystalline Si Thin-Film Solar Cells

EPJ Photovoltaics
Electronic EngineeringCondensed Matter PhysicsRenewable EnergySustainabilityOpticalElectricalMagnetic MaterialsElectronicthe Environment
2012English

1 000 000 °c/S Thin Film Electrical Heater:Insituresistivity Measurements of Al and Ti/Si Thin Films During Ultra Rapid Thermal Annealing

Applied Physics Letters
AstronomyPhysics
1994English

Effect of Rapid Thermal Annealing on Microstructural, Magnetic, and Microwave Properties of FeGaB Alloy Films

Journal of Applied Physics
AstronomyPhysics
2010English

Thin Dysprosium Oxide Films Formed by Rapid Thermal Annealing on Porous SiC Substrate

Semiconductor Physics, Quantum Electronics and Optoelectronics
Electronic EngineeringOpticsMolecular Physics,OpticalElectricalAtomicMagnetic MaterialsElectronic
2018English

Ferroelectric and Microstructural Characteristics of SrBi2Ta2O9 Thin Films Crystallized by the Rapid Thermal Annealing Process

Journal of Applied Physics
AstronomyPhysics
2001English

Epitaxial Germanidation of Full-Heusler Co2FeGe Alloy Thin Films Formed by Rapid Thermal Annealing

Journal of Applied Physics
AstronomyPhysics
2011English

Deposition of Polycrystalline ZnO Films by Two-Step Method and Characterization of Thermal Annealing Effects

Materials Research Society Symposium - Proceedings
Mechanics of MaterialsMaterials ScienceCondensed Matter PhysicsMechanical Engineering
2002English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2025 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy