A Pneumatically-Actuated Three-Way Microvalve Fabricated With Polydimethylsiloxane Using the Membrane Transfer Technique
Journal of Micromechanics and Microengineering - United Kingdom
doi 10.1088/0960-1317/10/3/317
Full Text
Open PDFAbstract
Available in full text
Categories
Date
July 10, 2000
Authors
Publisher
IOP Publishing