Strain Mapping of 45 Nm MOSFET by Dark-Field Inline Electron Holography

Microscopy and Microanalysis- United Kingdom

doi 10.1017/s1431927610057090

Full Text

Abstract

Available in

Categories

Instrumentation

Date

July 1, 2010

Authors

Publisher

Cambridge University Press (CUP)

Related search

Low-Dose Strain Mapping by Dark-Field Inline Electron Holography

Microscopy and Microanalysis

Instrumentation

English

Mapping of Process Induced Dopant Redistributions by Electron Holography

Microscopy and Microanalysis

Instrumentation

English

In-Plane Magnetic Field Evaluation With 0.47-Nm Resolution by Aberration-Corrected 1.2-Mv Holography Electron Microscope

Microscopy and Microanalysis

Instrumentation

English

Suppressing Geometric Phase Shift Owing to Antiphase Boundaries in Dark-Field Electron Holography

Materials Transactions

Mechanics of Materials

Materials Science

Condensed Matter Physics

Mechanical Engineering

English

Near-Field Ptychography: Phase Retrieval for Inline Holography Using a Structured Illumination

Scientific Reports

Multidisciplinary

English

Polarization and Charge Density Distribution in Highly Strained Mixed Phase BiFeO3 Studied by STEM and Electron Inline Holography

Microscopy and Microanalysis

Instrumentation

English

Low Voltage Electron Holography - High Voltage Electron Holography

Microscopy and Microanalysis

Instrumentation

Dutch

Chromatin Architecture: Investigation of a Subunit of Chromatin by Dark Field Electron Microscopy.

Proceedings of the National Academy of Sciences of the United States of America

Multidisciplinary

English

Ferroelectric Electron Holography

Microscopy and Microanalysis

Instrumentation

English