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Nucleation and Growth Mechanism of Si Amorphous Film Deposited by PIAD
Journal of Nanomaterials
- United States
doi 10.1155/2013/383867
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Categories
Materials Science
Nanotechnology
Nanoscience
Date
January 1, 2013
Authors
D. Li
G. L. Liu
Y. Yang
J. H. Wu
Z. R. Huang
Publisher
Hindawi Limited