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The Impact of Organic Contamination on the Oxide-Silicon Interface
doi 10.1063/1.3657894
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Date
January 1, 2011
Authors
D. Codegoni
M. L. Polignano
L. Castellano
G. Borionetti
F. Bonoli
A. Nutsch
A. Leibold
M. Otto
David G. Seiler
Alain C. Diebold
Robert McDonald
Amal Chabli
Erik M. Secula
Publisher
AIP