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An Optical Scanner Based on Cantilever-Type Electrostatic Zipping Actuators
doi 10.1117/12.767801
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Date
November 29, 2007
Authors
Smitha M. N. Rao
Praveen Pandojirao-Sunkojirao
Naresh Dhaubanjar
Mu Chiao
J.-C. Chiao
Publisher
SPIE
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