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Comb Capacitor Structures for Measurement of Post-Processed Layers
doi 10.1109/icmts.2008.4509339
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Date
March 1, 2008
Authors
D. Roy
J. H. Klootwijk
N. A. M. Verhaeghl
H. H. A. J. Roosen
R. A. M. Wolters
Publisher
IEEE
