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Kinetics and Compositional Dependence on the Microwave Power and SiH[sub 4]/N[sub 2] Flow Ratio of Silicon Nitride Deposited by Electron Cyclotron Resonance Plasmas

Journal of the Electrochemical Society - United States

doi 10.1149/1.2059309

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Date

January 1, 1994

Authors

M. J. Hernandez

Publisher

The Electrochemical Society

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Amanote Research

Kinetics and Compositional Dependence on the Microwave Power and SiH[sub 4]/N[sub 2] Flow Ratio of Silicon Nitride Deposited by Electron Cyclotron Resonance Plasmas

Journal of the Electrochemical Society - United States

doi 10.1149/1.2059309

Full Text

Abstract

Categories

Date

Authors

Publisher

Related search

Effects of Microwave Power on the Structural and Emission Properties of Hydrogenated Amorphous Silicon Carbide Deposited by Electron Cyclotron Resonance Chemical Vapor Deposition

Modeling of Electron Cyclotron Resonance Ion Source Plasmas

Effect of Collisions on Ion Dynamics in Electron‐cyclotron‐resonance Plasmas

Исследование Фазовых Переходов В Кристаллах (Cs,NH-=sub=-4-=/Sub=-)-=sub=-4-=/Sub=-(Hso-=sub=-4-=/Sub=-)-=sub=-3-=/Sub=-(H-=sub=-2-=/Sub=-Po-=sub=-4-=/Sub=-)

Production and Acceleration of Plasma by Electron Cyclotron Resonance (Coaxial Microwave Plasma Gun)

ELECTRON PARAMAGNETIC RESONANCE ABSORPTION STUDIES OF (Al$sub 2$O$sub 3$)/ Sub 1-X/ (Cr$sub 2$O$sub 3$)/Sub X/ WITH CONTROLLED NEUTRON TREATMENTS.

Протонпроводящие Композиционные Материалы На Основе Соединения Cs-=sub=-6-=/Sub=-H(hso-=sub=-4-=/Sub=-)-=sub=-3-=/Sub=-(H-=sub=-2-=/Sub=-Po-=sub=-4-=/Sub=-)-=sub=-4-=/Sub=-

Microwave Synthesis and Photocatalytic Properties of CeVO &Lt;sub>4</Sub>/FeVO<sub>4</Sub> Nanocomposites

Effect of NH[sub 3] on Film Properties of MOCVD Tungsten Nitride From Cl[sub 4](CH[sub 3]CN)W(N[sup I]Pr)

Amanote Research

Kinetics and Compositional Dependence on the Microwave Power and SiH[sub 4]/N[sub 2] Flow Ratio of Silicon Nitride Deposited by Electron Cyclotron Resonance Plasmas

Journal of the Electrochemical Society - United States

doi 10.1149/1.2059309

Full Text

Abstract

Categories

Date

Authors

Publisher

Related search

Effects of Microwave Power on the Structural and Emission Properties of Hydrogenated Amorphous Silicon Carbide Deposited by Electron Cyclotron Resonance Chemical Vapor Deposition

Modeling of Electron Cyclotron Resonance Ion Source Plasmas

Effect of Collisions on Ion Dynamics in Electron‐cyclotron‐resonance Plasmas

Исследование Фазовых Переходов В Кристаллах (Cs,NH-=sub=-4-=/Sub=-)-=sub=-4-=/Sub=-(Hso-=sub=-4-=/Sub=-)-=sub=-3-=/Sub=-(H-=sub=-2-=/Sub=-Po-=sub=-4-=/Sub=-)

Production and Acceleration of Plasma by Electron Cyclotron Resonance (Coaxial Microwave Plasma Gun)

ELECTRON PARAMAGNETIC RESONANCE ABSORPTION STUDIES OF (Al$sub 2$O$sub 3$)/ Sub 1-X/ (Cr$sub 2$O$sub 3$)/Sub X/ WITH CONTROLLED NEUTRON TREATMENTS.

Протонпроводящие Композиционные Материалы На Основе Соединения Cs-=sub=-6-=/Sub=-H(hso-=sub=-4-=/Sub=-)-=sub=-3-=/Sub=-(H-=sub=-2-=/Sub=-Po-=sub=-4-=/Sub=-)-=sub=-4-=/Sub=-

Microwave Synthesis and Photocatalytic Properties of CeVO &Lt;sub&gt;4&lt;/Sub&gt;/FeVO&lt;sub&gt;4&lt;/Sub&gt; Nanocomposites

Effect of NH[sub 3] on Film Properties of MOCVD Tungsten Nitride From Cl[sub 4](CH[sub 3]CN)W(N[sup I]Pr)

Microwave Synthesis and Photocatalytic Properties of CeVO &Lt;sub>4</Sub>/FeVO<sub>4</Sub> Nanocomposites