Laser-Induced Chemical Vapour Deposition of Silicon Carbonitride

Le Journal de Physique IV
doi 10.1051/jphyscol:19955112
Full Text
Abstract

Available in full text

Date
Authors
Publisher

EDP Sciences

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy