Chemical Reaction Modeling on LPCVD Reactors. 1st Report. Numerical Simulation of Polysilicon Film Growth Rate Distribution.
Nihon Kikai Gakkai Ronbunshu, B Hen/Transactions of the Japan Society of Mechanical Engineers, Part B - Japan
doi 10.1299/kikaib.63.660
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Date
January 1, 1997
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Japan Society of Mechanical Engineers