Amanote Research
Register
Sign In
Resonating Silicon Beam Force Sensor
Sensors and Actuators
doi 10.1016/0250-6874(89)80039-3
Full Text
Open PDF
Abstract
Available in
full text
Date
May 1, 1989
Authors
F.R. Blom
S. Bouwstra
J.H.J. Fluitman
M. Elwenspoek
Publisher
Elsevier BV
Related search
Thermally Excited Resonating Membrane Mass Flow Sensor
Sensors and Actuators
Force Controlled Robotic Assembly Without a Force Sensor
New Silicon Magnetic Field Sensor
Sensor Electronics and Microsystem Technologies
Silicon Nanowires as pH Sensor
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
Engineering
Astronomy
Physics
Collision Sensing Using Force/Torque Sensor
Journal of Sensors
Control
Systems Engineering
Instrumentation
Electrical
Electronic Engineering
Polishing Silicon Modification Layer on Silicon Carbide Surface by Ion Beam Figuring
Chinese Optics Letters
Electronic Engineering
Optics
Molecular Physics,
Optical
Electrical
Atomic
Magnetic Materials
Electronic
Silicon Sensor Probing and Radiation Studies for the LHCb Silicon Tracker
Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
High Energy Physics
Instrumentation
Nuclear
Vinculin Force Sensor Detects Tumor-Osteocyte Interactions
Scientific Reports
Multidisciplinary
A Silicon Straight Tube Fluid Density Sensor
Journal of Micromechanics and Microengineering
Mechanics of Materials
Electronic Engineering
Mechanical Engineering
Nanoscience
Optical
Electrical
Magnetic Materials
Nanotechnology
Electronic