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Publications by Akifumi Onodera
Formation of BNBased Superhard Nano Composites Using Chemical Vapor Deposition/High Pressure Hybrid Process.
Materia Japan
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Germanium Thin Film Formation by Low-Pressure Chemical Vapor Deposition
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Causes of Anomalous Solid Formation in the Exhaust Systems of Low-Pressure Chemical Vapor Deposition and Plasma Enhanced Chemical Vapor Deposition Semiconductor Processes
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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SiGeSn Growth Studies Using Reduced Pressure Chemical Vapor Deposition Towards Optoelectronic Applications
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Process Control in Metalorganic Chemical Vapor Deposition of CdTe
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Thermal Expansion of Low-Pressure Chemical Vapor Deposition Polysilicon Films
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Structure Controlled Synthesis of Vertically Aligned Carbon Nanotubes Using Thermal Chemical Vapor Deposition Process
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Low Pressure Chemical Vapor Deposition of A-Si:H From Disilane
Chemical-Vapor Deposition of Complex Oxides: Materials and Process Development
