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Publications by Albert Rauch

Plasma Potential Mapping of High Power Impulse Magnetron Sputtering Discharges

Journal of Applied Physics

English

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High Power Impulse Magnetron Sputtering Discharge

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

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Investigation of Plasma Spokes in Reactive High Power Impulse Magnetron Sputtering Discharge

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Hysteresis-Free Reactive High Power Impulse Magnetron Sputtering

Thin Solid Films

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Evolution of Sputtering Target Surface Composition in Reactive High Power Impulse Magnetron Sputtering

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Deposition of Yttria-Stabilized Zirconia Thin Films by High Power Impulse Magnetron Sputtering and Pulsed Magnetron Sputtering

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Exploring the Potential of High Power Impulse Magnetron Sputtering for Growth of Diamond-Like Carbon Films

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Growth of HfN Thin Films by Reactive High Power Impulse Magnetron Sputtering

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Effect of Peak Power in Reactive High Power Impulse Magnetron Sputtering of Titanium Dioxide

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SiNxCoatings Deposited by Reactive High Power Impulse Magnetron Sputtering: Process Parameters Influencing the Nitrogen Content

ACS Applied Materials & Interfaces

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