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Publications by Alexander Uvarov
The Study of Latex Sphere Lithography for High Aspect Ratio Dry Silicon Etching
Physica Status Solidi (A) Applications and Materials Science
Surfaces
Electronic Engineering
Condensed Matter Physics
Materials Chemistry
Optical
Electrical
Magnetic Materials
Films
Coatings
Electronic
Interfaces
Related publications
Anisotropic Bulk Etching of (110) Silicon With High Aspect Ratio
IEEJ Transactions on Sensors and Micromachines
Electronic Engineering
Electrical
Mechanical Engineering
High Aspect Ratio Etching of Atomic Force Microscope-Patterned Nitrided Silicon
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Process Characterization of Wet Etching for High Aspect Ratio Microneedles Development
Advanced Materials Research
Improvement of Homogeneity and Aspect Ratio of Silicon Tips for Field Emission by Reactive-Ion Etching
Advances in Materials Science and Engineering
Materials Science
Engineering
Etching Technologies of Silicon Wafer Using Dry Process
Journal of The Surface Finishing Society of Japan
Fabrication of Tapered Micropillars With High Aspect-Ratio Based on Deep X-Ray Lithography
Materials
Materials Science
Condensed Matter Physics
Silicon Microfabrication: Controlled Microfabrication of High-Aspect-Ratio Structures in Silicon at the Highest Etching Rates: The Role of H2 O2 in the Anodic Dissolution of Silicon in Acidic Electrolytes (Adv. Funct. Mater. 6/2017)
Advanced Functional Materials
Materials Science
Condensed Matter Physics
Electrochemistry
Nanoscience
Optical
Biomaterials
Magnetic Materials
Nanotechnology
Chemistry
Electronic
Lithography-Free Fabrication of Silicon Nanowire and Nanohole Arrays by Metal-Assisted Chemical Etching
Nanoscale Research Letters
Materials Science
Nanotechnology
Condensed Matter Physics
Nanoscience
Magnetic Field Alignment of Randomly Oriented, High Aspect Ratio Silicon Microwires Into Vertically Oriented Arrays
ACS Nano
Materials Science
Nanoscience
Engineering
Nanotechnology
Astronomy
Physics
