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Publications by C Kübel

Electron Tomography of Microelectronic Device Interconnects

Microscopy and Microanalysis
Instrumentation
2005English

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Device Requirements for Optical Interconnects to Silicon Chips

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Low-Energy Broad Area Electron Beam for Etching Microelectronic Materials

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Electron Tomography of Frozen-Hydrated Sections

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Informatics Resources for Electron Tomography

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Simplifying Minimum Dose Electron Tomography

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A Review of Microelectronic Film Deposition Using Direct and Remote Electron-Beam-Generated Plasmas

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Thin‐oxide Charging Damage to Microelectronic Test Structures in an Electron‐cyclotron‐resonance Plasma

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