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Publications by C. C. Cheng
Surface Chemistry During Plasma Etching of Silicon
Pure and Applied Chemistry
Chemistry
Chemical Engineering
Implications of NRL/ATM Solar Flare Observations on Flare Theories
Symposium - International Astronomical Union
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Surface Chemistry of Silicon Nanoclusters
Physical Review Letters
Astronomy
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Origin of Plasma-Induced Surface Roughening and Ripple Formation During Plasma Etching: The Crucial Role of Ion Reflection
Journal of Applied Physics
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Remote Plasma Etching of Silicon Nitride and Silicon Dioxide Using NF3/O2 Gas Mixtures
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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Films
Interfaces
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Surface Stress During Silicon Oxidation Using Plasma of Krypton and Oxygen Mixture.
SHINKU
Chemical Etching of Silicon
Microscopy Today
Surface Chemistry of Aerosolized Nanoparticles:Thermal Oxidation of Silicon
Genesis and Propagation of Fractal Structures During Photoelectrochemical Etching of N-Silicon
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Kinetic Monte Carlo Simulations of Surface Growth During Plasma Deposition of Silicon Thin Films
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Ultra-Low Reflective Micro-Structures Fabricated by One-Step Advanced Silicon Etching on Silicon Surface