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Publications by C. M. Leewis

Formation of Cationic Silicon Clusters in a Remote Silane Plasma and Their Contribution to Hydrogenated Amorphous Silicon Film Growth

Journal of Applied Physics

English

Related publications

Reaction Between Hydrogenated Amorphous Silicon and Aluminum Film

Transactions of the Japan Institute of Metals

English

Molecular Dynamics Simulation of Hydrogenated Amorphous Silicon Formation

IEEJ Transactions on Fundamentals and Materials

Electronic Engineering

English

In Situ Single Wavelength Ellipsometry Studies of High Rate Hydrogenated Amorphous Silicon Growth Using a Remote Expanding Thermal Plasma

Journal of Applied Physics

English

Surface-Diffusion-Controlled Incorporation of Nanosized Voids During Hydrogenated Amorphous Silicon Film Growth

Applied Physics Letters

English

Temperature Dependence of the Surface Roughness Evolution During Hydrogenated Amorphous Silicon Film Growth

Applied Physics Letters

English

Properties of Amorphous Silicon Thin Films and Their Film Growth Processes.

English

Thermal-Equilibrium Defects in Undoped Hydrogenated Amorphous Silicon, Silicon-Carbon, and Silicon-Nitrogen

Physical Review B

English

Optical Properties of Hydrogenated Amorphous Silicon

Journal of Applied Physics

English

Nanoparticle Deposition in Hydrogenated Amorphous Silicon Films During Rf Plasma Deposition

Applied Physics Letters

English