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Publications by C. Schütte
Advanced Solutions for Nanoimprint Lithography
Nanoindustry Russia
Related publications
Nanoimprint Lithography and Future Patterning for Semiconductor Devices
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Soft Photocurable Nanoimprint Lithography for Compound Semiconductor Nanostructures
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Metal Hierarchical Patterning by Direct Nanoimprint Lithography
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Successors of ArF Water-Immersion Lithography: EUV Lithography, Multi-E-Beam Maskless Lithography, or Nanoimprint?
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Au Nanostructure Arrays for Plasmonic Applications: Annealed Island Films Versus Nanoimprint Lithography
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