Amanote Research
Register
Sign In
Discover open access scientific publications
Search, annotate, share and cite publications
Publications by Christof Klein
Progress in Projection Maskless Lithography
SPIE Newsroom
Related publications
Successors of ArF Water-Immersion Lithography: EUV Lithography, Multi-E-Beam Maskless Lithography, or Nanoimprint?
Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic Engineering
Condensed Matter Physics
Mechanical Engineering
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Nanotechnology
Optics
Optimization Methods for 3D Lithography Process Utilizing DMD-based Maskless Grayscale Photolithography System
Fabrication and Testing of Optics for EUV Projection Lithography
Progress in EUV Resists Towards High-Na EUV Lithography
Printed Graphene Electrochemical Biosensors Fabricated by Inkjet Maskless Lithography for Rapid and Sensitive Detection of Organophosphates
Progress Report: Engineers Take the EUV Lithography Challenge
SPIE Newsroom
Progress in Spin-On Hard Mask Materials for Advanced Lithography
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Improving the Efficiency of Pattern Extraction for Character Projection Lithography Using OPC Optimization
Progress Overview of EUV Resists Status Towards High-Na EUV Lithography
