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Publications by D. Mataras

A Hybrid Kinetic Monte Carlo Method for Simulating Silicon Films Grown by Plasma-Enhanced Chemical Vapor Deposition

Journal of Chemical Physics

Theoretical Chemistry

English

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Kinetic Monte Carlo Simulations of Surface Growth During Plasma Deposition of Silicon Thin Films

Journal of Chemical Physics

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Gallium Assisted Plasma Enhanced Chemical Vapor Deposition of Silicon Nanowires

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Preparation of Titanium Nitride Films by Plasma-Enhanced Chemical Vapor Deposition (II)

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Plasma-Etching-Enhanced Deep Centers in N-GaN Grown by Metalorganic Chemical-Vapor Deposition

Applied Physics Letters

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Defects in Silicon Carbide Grown by Fluorinated Chemical Vapor Deposition Chemistry

Physica B: Condensed Matter

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Weatherability of Amorphous Carbon Films Synthesized by Atmospheric-Pressure Plasma-Enhanced Chemical Vapor Deposition

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Development of Low Temperature Silicon Nitride and Silicon Dioxide Films by Inductively-Coupled Plasma Chemical Vapor Deposition

Materials Research Society Symposium - Proceedings

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Addendum to "Effective GaN Surface Passivation by Plasma Enhanced Chemical Vapor Deposition of Silicon Oxide"

International Journal of Nanoscience

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Forming Silicon Carbon Nitride Crystals and Silicon Carbon Nitride Nanotubes by Microwave Plasma-Enhanced Chemical Vapor Deposition

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