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Publications by Daniel Andruczyk

Origin of Defects on Targets Used to Make Extreme Ultraviolet Mask Blanks

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

Related publications

Extreme Ultraviolet Interferometry

English

Extreme Ultraviolet Multilayer Reflectors

AIP Conference Proceedings

English

Extreme Ultraviolet Alignment and Testing of a Four-Mirror Ring Field Extreme Ultraviolet Optical System

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English

Erratum To: Reconstruction of Solar Extreme Ultraviolet Flux 1740 – 2015

Planetary Science

English

Terbium-Based Extreme Ultraviolet Multilayers

Molecular Physics,

English

Photoluminescence-Based Detection of Particle Contamination on Extreme Ultraviolet Reticles

Review of Scientific Instruments

Instrumentation

English

Empirical Determination of Extreme Ultraviolet Imager Background

Journal of Geophysical Research: Space Physics

English

Overcoming Mask Blank Defects in EUV Lithography

English

Extending Resonant Inelastic X-Ray Scattering to the Extreme Ultraviolet

Frontiers in Physics

Materials Science

Theoretical Chemistry

Mathematical Physics

English