Amanote Research
Register
Sign In
Discover open access scientific publications
Search, annotate, share and cite publications
Publications by E Schüngel
Excitation Dynamics in Electrically Asymmetric Capacitively Coupled Radio Frequency Discharges: Experiment, Simulation, and Model
Plasma Sources Science and Technology
Condensed Matter Physics
The Influence of Electron Reflection/Sticking Coefficients at the Electrodes on Plasma Parameters in Particle-In-Cell Simulations of Capacitive Radio-Frequency Plasmas
Plasma Sources Science and Technology
Condensed Matter Physics
Related publications
Power Absorption in Electrically Asymmetric Dual Frequency Capacitive Radio Frequency Discharges
Physics of Plasmas
Condensed Matter Physics
Capacitively Coupled Radio-Frequency Hydrogen Discharges: The Role of Kinetics
Journal of Applied Physics
Astronomy
Physics
Electron Bounce Resonance Heating in Dual-Frequency Capacitively Coupled Oxygen Discharges
Plasma Sources Science and Technology
Condensed Matter Physics
Experimental and Computational Investigations of the Effect of the Electrode Gap on Capacitively Coupled Radio Frequency Oxygen Discharges
Physics of Plasmas
Condensed Matter Physics
Breakdown Mechanism of Capacitively Coupled RF Discharges
IEEJ Transactions on Fundamentals and Materials
Electronic Engineering
Electrical
Observations of Electron Energy Distribution Functions and Ion Bombardment Secondary Electrons in a Capacitively Coupled Radio Frequency Plasma
IEEJ Transactions on Fundamentals and Materials
Electronic Engineering
Electrical
Ion Energy Distributions in Inductively Coupled Radio-Frequency Discharges in Argon, Nitrogen, Oxygen, Chlorine, and Their Mixtures
Journal of Applied Physics
Astronomy
Physics
Electron Heating by Sheaths in Radio Frequency Discharges
Journal of Applied Physics
Astronomy
Physics
Spatial Behavior of Energy Relaxation of Electrons in Capacitively Coupled Discharges: Comparison Between Ar and SiH4
Journal of Applied Physics
Astronomy
Physics
