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Publications by F.R. Blom

Optically Activated ZnO/Sio2/Si Cantilever Beams

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
1990English

Resonating Silicon Beam Force Sensor

Sensors and Actuators
1989English

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