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Publications by Frauke Weimar
Integration of CMP Fixed Abrasive Polishing Into the Manufacturing of Thick Film SOI Substrates
Materials Research Society Symposium - Proceedings
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
A Novel CMP Process on Fixed Abrasive Pads for the Manufacturing of Highly Planar Thick Film SOI Substrates
Materials Research Society Symposium - Proceedings
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
Advances in the CMP Process on Fixed Abrasive Pads for the Polishing of SOISubstrates With High Degree of Flatness
Materials Research Society Symposium - Proceedings
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
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