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Publications by Gottlieb S. Oehrlein

Fluorocarbon Assisted Atomic Layer Etching of SiO2 Using Cyclic Ar/C4f8 Plasma

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2014English

Molecular Dynamics Simulations of Ar+-Induced Transport of Fluorine Through Fluorocarbon Films

Applied Physics Letters
AstronomyPhysics
2004English

Reactive Ion Etching of SiGe Alloys Using HBr

Applied Physics Letters
AstronomyPhysics
1991English

Substrate Interconnect Technologies for 3-D MEMS Packaging

Microelectronic Engineering
SurfacesElectronic EngineeringCondensed Matter PhysicsElectronicMolecular Physics,NanoscienceOpticalElectricalAtomicMagnetic MaterialsFilmsNanotechnologyOpticsCoatings
2005English

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Publisher Correction: Theory-Guided Design of Catalytic Materials Using Scaling Relationships and Reactivity Descriptors

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Seeing Hydrogen

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