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Publications by Guangnan Yao

Three-Dimensional in Situ Electron Beam Lithography Using Water Ice

Materials Science

Condensed Matter Physics

Mechanical Engineering

English

Related publications

Electron Beam Lithography System.

Journal of the Japan Society of Precision Engineering

English

Three-Dimensional Analysis Using Focused Ion Beam and Electron Microscope

Vacuum and Surface Science

English

Fifty Nanometer Lines Patterned Into Silica Using Water Developable Chitosan Bioresist and Electron Beam Lithography

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Electronic Engineering

Condensed Matter Physics

Instrumentation

Materials Chemistry

Magnetic Materials

Process Chemistry

English

Precision Analysis of Electron Beam Lithography

IEEJ Transactions on Electronics, Information and Systems

Electronic Engineering

English

Multiple-Beam Interference Lithography With Electron Beam Written Gratings

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English

Three-Dimensional Cathodoluminescence by Focused Ion Beam - Scanning Electron Microscopy

Microscopy and Microanalysis

Instrumentation

English

Electron Beam Lithography Using GaAs Oxidized Resist for GaAs/AlGaAs Ultrafine Structure Fabrication.

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

Fabricating Three-Dimensional Nanostructures Using Two Photon Lithography in a Single Exposure Step

Molecular Physics,

English

Successors of ArF Water-Immersion Lithography: EUV Lithography, Multi-E-Beam Maskless Lithography, or Nanoimprint?

Journal of Micro/ Nanolithography, MEMS, and MOEMS

Electronic Engineering

Condensed Matter Physics

Mechanical Engineering

Molecular Physics,

Magnetic Materials

English