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Publications by H. B. Profijt

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2011English

Substrate-Biasing During Plasma-Assisted Atomic Layer Deposition to Tailor Metal-Oxide Thin Film Growth

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2013English

Related publications

Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
2006English

Study on Deposition of Al2O3 Films by Plasma-Assisted Atomic Layer With Different Plasma Sources

Plasma Science and Technology
Condensed Matter Physics
2018English

In Situ Reaction Mechanism Studies of Plasma-Assisted Atomic Layer Deposition of Al2O3

Applied Physics Letters
AstronomyPhysics
2006English

Atomic Layer Deposition of InN Using Trimethylindium and Ammonia Plasma

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2019English

Atomic Layer Deposition: Conformal Physical Vapor Deposition Assisted by Atomic Layer Deposition and Its Application for Stretchable Conductors (Adv. Mater. Interfaces 22/2018)

Advanced Materials Interfaces
Mechanics of MaterialsMechanical Engineering
2018English

Reaction Mechanisms During Plasma-Assisted Atomic Layer Deposition of Metal Oxides: A Case Study for Al2O3

Journal of Applied Physics
AstronomyPhysics
2008English

Theαandγplasma Modes in Plasma-Enhanced Atomic Layer Deposition With O2–N2capacitive Discharges

Journal of Physics D: Applied Physics
SurfacesUltrasonicsCondensed Matter PhysicsAcousticsOpticalMagnetic MaterialsFilmsCoatingsElectronic
2017English

Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide

Nanoscale Research Letters
Materials ScienceNanotechnologyCondensed Matter PhysicsNanoscience
2019English

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